Ion Implantation


With the advent of single wafer ion implantation techniques, Westwind supplied high stiffness linear air bearing spindles for accurate positioning of the wafer in the ion beam during doping.

Features include:
  • Ultra smooth movement
  • Stroke length of more than 300mm
  • Operate in 10-7 Torr vacuum
Air bearing advantages:

High accuracy and low contamination
ion implantation spindle

For further information about Westwind's ion implantation spindles,
please e-mail wwinfo@gsig.com.